Wataru Nakagomi

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
System, method and storage medium for controlling a processing system
- Patent number 8,280,852
- Issue date Oct 2, 2012
- Tokyo Electron Limited
- Hiroshi Nakamura
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210280445
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Wataru NAKAGOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM, METHOD AND STORAGE MEDIUM FOR CONTROLLING A PROCESSING SYSTEM
- Publication number 20090076640
- Publication date Mar 19, 2009
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- G06 - COMPUTING CALCULATING COUNTING