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Wataru Ozawa
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Kurokawa-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,861,675
Issue date
Dec 8, 2020
Tokyo Electron Limited
Takao Funakubo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control method, control apparatus, and plasma processin...
Patent number
10,254,774
Issue date
Apr 9, 2019
Tokyo Electron Limited
Tatsuya Miura
G05 - CONTROLLING REGULATING
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,204,763
Issue date
Feb 12, 2019
Tokyo Electron Limited
Takao Funakubo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, plasma processing method, and storage...
Patent number
9,299,540
Issue date
Mar 29, 2016
Tokyo Electron Limited
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, plasma processing method, and storage...
Patent number
8,864,934
Issue date
Oct 21, 2014
Tokyo Electron Limited
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20190139744
Publication date
May 9, 2019
TOKYO ELECTRON LIMITED
Takao FUNAKUBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20150380282
Publication date
Dec 31, 2015
TOKYO ELECTRON LIMITED
Takao FUNAKUBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...
Publication number
20150001181
Publication date
Jan 1, 2015
TOKYO ELECTRON LIMITED
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL METHOD, CONTROL APPARATUS, AND PLASMA PROCESSIN...
Publication number
20140288726
Publication date
Sep 25, 2014
Tatsuya Miura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...
Publication number
20120248067
Publication date
Oct 4, 2012
TOKYO ELECTRON LIMITED
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS