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Wataru SAKAMOTO
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Miyagi, JP
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last 30 patents
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Patent Grant
Method for manufacturing three-dimensional semiconductor memory device
Patent number
11,501,998
Issue date
Nov 15, 2022
Tokyo Electron Limited
Kazuo Kibi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
HIGH-THROUGHPUT DRY ETCHING OF SILICON OXIDE AND SILICON NITRIDE MA...
Publication number
20210233775
Publication date
Jul 29, 2021
TOKYO ELECTRON LIMITED
Du Zhang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD FOR MANUFACTURING THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE
Publication number
20200381294
Publication date
Dec 3, 2020
TOKYO ELECTRON LIMITED
Kazuo KIBI
H01 - BASIC ELECTRIC ELEMENTS