Wataru SHIMIZU

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and method for installing edge ring
- Patent number 12,308,221
- Issue date May 20, 2025
- Tokyo Electron Limited
- Takashi Aramaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and cleaning method
- Patent number 12,261,024
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Wataru Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and cleaning method
- Patent number 11,264,218
- Issue date Mar 1, 2022
- Tokyo Electron Limited
- Wataru Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method and storage medium
- Patent number 9,059,103
- Issue date Jun 16, 2015
- Tokyo Electron Limited
- Wataru Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and storage medium
- Patent number 8,870,164
- Issue date Oct 28, 2014
- Tokyo Electron Limited
- Wataru Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method for recovering a damaged low-k film of a substrat...
- Patent number 8,048,687
- Issue date Nov 1, 2011
- Tokyo Electron Limited
- Wataru Shimizu
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Focus ring and plasma processing apparatus
- Patent number 7,658,816
- Issue date Feb 9, 2010
- Tokyo Electron Limited
- Akira Koshiishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of fabricating the same
- Patent number 7,105,464
- Issue date Sep 12, 2006
- Oki Electric Industry Co., Ltd.
- Kazuhiko Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and methods of fabricating the same
- Patent number 6,787,886
- Issue date Sep 7, 2004
- Oki Electric Industry Co., Ltd.
- Kazuhiko Asakawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD FOR INSTALLING EDGE RING
- Publication number 20250079138
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Takashi ARAMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DECOMPRESSION PROCESSING METHOD FOR SUBSTRATE PROCESSING APPARATUS...
- Publication number 20220351943
- Publication date Nov 3, 2022
- TOKYO ELECTRON LIMITED
- Wataru SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD
- Publication number 20220223382
- Publication date Jul 14, 2022
- TOKYO ELECTRON LIMITED
- Wataru SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND CLEANING METHOD
- Publication number 20220208524
- Publication date Jun 30, 2022
- TOKYO ELECTRON LIMITED
- Wataru Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220148861
- Publication date May 12, 2022
- TOKYO ELECTRON LIMITED
- Wataru SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD
- Publication number 20200251316
- Publication date Aug 6, 2020
- TOKYO ELECTRON LIMITED
- Wataru SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20120244720
- Publication date Sep 27, 2012
- TOKYO ELECTRON LIMITED
- Wataru SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20110177695
- Publication date Jul 21, 2011
- TOKYO ELECTRON LIMITED
- Wataru Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20100304505
- Publication date Dec 2, 2010
- TOKYO ELECTRON LIMITED
- Wataru Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focus ring and plasma processing apparatus
- Publication number 20070169891
- Publication date Jul 26, 2007
- TOKYO ELECTRON LIMITED
- Akira Koshiishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MEMORY DEVICE
- Publication number 20060278953
- Publication date Dec 14, 2006
- Oki Electric Industry Co., Ltd.
- Wataru SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method of fabricating the same
- Publication number 20060270249
- Publication date Nov 30, 2006
- Kazuhiko Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method of fabricating the same
- Publication number 20040219781
- Publication date Nov 4, 2004
- Kazuhiko Asakawa
- H01 - BASIC ELECTRIC ELEMENTS

Wataru SHIMIZU

Person

Patents Grantslast 30 patents

Substrate processing system and method for installing edge ring

Plasma processing apparatus and cleaning method

Substrate processing apparatus and cleaning method

Processing method and storage medium

Substrate processing method and storage medium

Processing method for recovering a damaged low-k film of a substrat...

Focus ring and plasma processing apparatus

Semiconductor device and method of fabricating the same

Semiconductor device and methods of fabricating the same

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM AND METHOD FOR INSTALLING EDGE RING

DECOMPRESSION PROCESSING METHOD FOR SUBSTRATE PROCESSING APPARATUS...

SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD

PLASMA PROCESSING APPARATUS AND CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD

PROCESSING METHOD AND STORAGE MEDIUM

SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM

PROCESSING METHOD AND STORAGE MEDIUM

Focus ring and plasma processing apparatus

SEMICONDUCTOR MEMORY DEVICE

Semiconductor device and method of fabricating the same

Semiconductor device and method of fabricating the same