Wataru Sugimura

Person

Saga-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of estimating convection pattern of silicon melt, method of...
- Patent number 11,885,038
- Issue date Jan 30, 2024
- Sumco Corporation
- Wataru Sugimura
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for controlling convection pattern of silicon melt, method f...
- Patent number 11,781,242
- Issue date Oct 10, 2023
- Sumco Corporation
- Hideki Sakamoto
- C30 - CRYSTAL GROWTH
Information Patent Grant
Silicon monocrystal manufacturing method and silicon monocrystal pu...
- Patent number 11,441,238
- Issue date Sep 13, 2022
- Sumco Corporation
- Ryusuke Yokoyama
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of controlling convection patterns of silicon melt and metho...
- Patent number 11,261,540
- Issue date Mar 1, 2022
- Sumco Corporation
- Naoki Matsushima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for controlling convection pattern of silicon melt and metho...
- Patent number 11,186,921
- Issue date Nov 30, 2021
- Sumco Corporation
- Ryusuke Yokoyama
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of producing silicon single crystal ingot and silicon single...
- Patent number 11,078,595
- Issue date Aug 3, 2021
- Sumco Corporation
- Masataka Hourai
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method and apparatus for manufacturing silicon single crystal
- Patent number 10,858,753
- Issue date Dec 8, 2020
- Sumco Corporation
- Wataru Sugimura
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for manufacturing silicon single crystal and melt inlet p...
- Patent number 10,415,150
- Issue date Sep 17, 2019
- Sumco Corporation
- Mitsuaki Hayashi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Silicon wafer and method for manufacturing the same
- Patent number 8,758,505
- Issue date Jun 24, 2014
- Sumitomo Mitsubishi Silicon Corporation
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Grant
Silicon single crystal wafer for IGBT and method for manufacturing...
- Patent number 8,617,311
- Issue date Dec 31, 2013
- Sumco Corporation
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Grant
Silicon wafer and method for manufacturing the same
- Patent number 7,824,493
- Issue date Nov 2, 2010
- Sumitomo Mitsubishi Silicon Corporation
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Grant
Process for producing SOI substrate and process for regeneration of...
- Patent number 7,790,573
- Issue date Sep 7, 2010
- Sumco Corporation
- Akihiko Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon wafer, SOI substrate, method for growing silicon single cry...
- Patent number 7,704,318
- Issue date Apr 27, 2010
- Sumco Corporation
- Masataka Hourai
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for manufacturing silicon wafer method
- Patent number 7,700,394
- Issue date Apr 20, 2010
- Sumco Corporation
- Shinsuke Sadamitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon wafer, method for producing silicon wafer and method for gr...
- Patent number 7,637,997
- Issue date Dec 29, 2009
- Sumco Corporation
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Grant
Process for producing silicon single crystal
- Patent number 7,628,854
- Issue date Dec 8, 2009
- Sumco Corporation
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for manufacturing silicon single crystal, and silicon wafer
- Patent number 7,435,294
- Issue date Oct 14, 2008
- Sumco Corporation
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for manufacturing semiconductor single crystal
- Patent number 7,384,480
- Issue date Jun 10, 2008
- Sumco Corporation
- Wataru Sugimura
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for growing silicon single crystal and silicon wafer
- Patent number 7,374,741
- Issue date May 20, 2008
- Sumco Corporation
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Grant
Silicon wafer, method for manufacturing the same and method for gro...
- Patent number 7,364,618
- Issue date Apr 29, 2008
- Sumco Corporation
- Masataka Hourai
- C30 - CRYSTAL GROWTH
Information Patent Grant
Process for growing silicon single crystal and process for producin...
- Patent number 7,320,731
- Issue date Jan 22, 2008
- Sumco Corporation
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for manufacturing semiconductor single crystal
- Patent number 7,306,676
- Issue date Dec 11, 2007
- Sumco Corporation
- Wataru Sugimura
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Manufacturing method of hydrogen-doped silicon single crystal
- Patent number 7,300,517
- Issue date Nov 27, 2007
- Sumco Corporation
- Wataru Sugimura
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
PRODUCTION METHOD FOR SILICON MONOCRYSTAL AND PRODUCTION METHOD FOR...
- Publication number 20240368802
- Publication date Nov 7, 2024
- SUMCO CORPORATION
- Wataru SUGIMURA
- C30 - CRYSTAL GROWTH
Information Patent Application
HEATING PART OF SILICON SINGLE CRYSTAL MANUFACTURING DEVICE, CONVEC...
- Publication number 20240060208
- Publication date Feb 22, 2024
- SUMCO CORPORATION
- Ryusuke YOKOYAMA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR CONTROLLING CONVECTION PATTERN OF SILICON MELT AND METHO...
- Publication number 20210140066
- Publication date May 13, 2021
- SUMCO CORPORATION
- Ryusuke YOKOYAMA
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON MONOCRYSTAL MANUFACTURING METHOD AND SILICON MONOCRYSTAL PU...
- Publication number 20210108337
- Publication date Apr 15, 2021
- SUMCO CORPORATION
- Ryusuke YOKOYAMA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF CONTROLLING CONVECTION PATTERNS OF SILICON MELT AND METHO...
- Publication number 20200407875
- Publication date Dec 31, 2020
- SUMCO CORPORATION
- Naoki MATSUSHIMA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR CONTROLLING CONVECTION PATTERN OF SILICON MELT, METHOD F...
- Publication number 20200399783
- Publication date Dec 24, 2020
- SUMCO CORPORATION
- Hideki SAKAMOTO
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF ESTIMATING CONVECTION PATTERN OF SILICON MELT, METHOD OF...
- Publication number 20200399780
- Publication date Dec 24, 2020
- SUMCO CORPORATION
- Wataru SUGIMURA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING SILICON SINGLE CRYSTAL
- Publication number 20200165742
- Publication date May 28, 2020
- SUMCO CORPORATION
- Wataru SUGIMURA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF PRODUCING SILICON SINGLE CRYSTAL INGOT AND SILICON SINGLE...
- Publication number 20200040480
- Publication date Feb 6, 2020
- SUMCO CORPORATION
- Wataru Sugimura
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF PRODUCING SILICON SINGLE CRYSTAL INGOT AND SILICON SINGLE...
- Publication number 20190352796
- Publication date Nov 21, 2019
- SUMCO CORPORATION
- Masataka HOURAI
- C01 - INORGANIC CHEMISTRY
Information Patent Application
APPARATUS FOR MANUFACTURING SILICON SINGLE CRYSTAL AND MELT INLET P...
- Publication number 20180066377
- Publication date Mar 8, 2018
- SUMCO CORPORATION
- Mitsuaki HAYASHI
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF PRODUCING EPITAXIAL WAFER AS WELL AS EPITAXIAL WAFER
- Publication number 20110052923
- Publication date Mar 3, 2011
- SUMCO CORPORATION
- Shigeru Umeno
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON SINGLE CRYSTAL WAFER FOR IGBT AND METHOD FOR MANUFACTURING...
- Publication number 20100288184
- Publication date Nov 18, 2010
- Toshiaki ONO
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON WAFER AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20100178753
- Publication date Jul 15, 2010
- Sumitomo Mitsubishi Silicon Corporation
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON SINGLE CRYSTAL AND METHOD FOR GROWING THEREOF, AND SILICON...
- Publication number 20100127354
- Publication date May 27, 2010
- SUMCO CORPORATION
- Toshiaki ONO
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for growing silicon single crystal, and silicon wafer
- Publication number 20090293799
- Publication date Dec 3, 2009
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for growing silicon single crystal, and silicon wafer
- Publication number 20090261301
- Publication date Oct 22, 2009
- SUMCO CORPORATION
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for Manufacturing Silicon Wafer and Silicon Wafer Manufactur...
- Publication number 20080118424
- Publication date May 22, 2008
- Shinsuke Sadamitsu
- C30 - CRYSTAL GROWTH
Information Patent Application
Silicon single crystal wafer for IGBT and method for manufacturing...
- Publication number 20070193501
- Publication date Aug 23, 2007
- SUMCO CORPORATION
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Application
Silicon wafer, method for manufacturing the same and method for gro...
- Publication number 20070157870
- Publication date Jul 12, 2007
- SUMCO CORPORATION
- Masataka Hourai
- C30 - CRYSTAL GROWTH
Information Patent Application
Silicon wafer and method for producing same
- Publication number 20070095274
- Publication date May 3, 2007
- SUMCO CORPORATION
- Wataru Sugimura
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for growing silicon single crystal and silicon wafer
- Publication number 20070034138
- Publication date Feb 15, 2007
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Application
Manufacturing method of hydrogen-doped silicon single crystal
- Publication number 20070028832
- Publication date Feb 8, 2007
- SUMCO CORPORATION
- Wataru Sugimura
- C30 - CRYSTAL GROWTH
Information Patent Application
Process for producing silicon single crystal
- Publication number 20070017434
- Publication date Jan 25, 2007
- SUMCO CORPORATION
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Application
Process for growing silicon single crystal and process for producin...
- Publication number 20070017436
- Publication date Jan 25, 2007
- SUMCO CORPORATION
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus for manufacturing semiconductor single crystal
- Publication number 20060283381
- Publication date Dec 21, 2006
- SUMCO CORPORATION
- Wataru Sugimura
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus for manufacturing semiconductor single crystal
- Publication number 20060283376
- Publication date Dec 21, 2006
- SUMCO CORPORATION
- Wataru Sugimura
- C30 - CRYSTAL GROWTH
Information Patent Application
Silicon wafer, method for producing silicon wafer and method for gr...
- Publication number 20060266278
- Publication date Nov 30, 2006
- SUMCO CORPORATION
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for supplying hydrogen gas in silicon single-crystal growth,...
- Publication number 20060249074
- Publication date Nov 9, 2006
- SUMCO CORPORATION
- Wataru Sugimura
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for growing silicon single crystal, and silicon wafer
- Publication number 20060225639
- Publication date Oct 12, 2006
- Toshiaki Ono
- C30 - CRYSTAL GROWTH

Wataru Sugimura

Person

Patents Grantslast 30 patents

Method of estimating convection pattern of silicon melt, method of...

Method for controlling convection pattern of silicon melt, method f...

Silicon monocrystal manufacturing method and silicon monocrystal pu...

Method of controlling convection patterns of silicon melt and metho...

Method for controlling convection pattern of silicon melt and metho...

Method of producing silicon single crystal ingot and silicon single...

Method and apparatus for manufacturing silicon single crystal

Apparatus for manufacturing silicon single crystal and melt inlet p...

Silicon wafer and method for manufacturing the same

Silicon single crystal wafer for IGBT and method for manufacturing...

Silicon wafer and method for manufacturing the same

Process for producing SOI substrate and process for regeneration of...

Silicon wafer, SOI substrate, method for growing silicon single cry...

Method for manufacturing silicon wafer method

Silicon wafer, method for producing silicon wafer and method for gr...

Process for producing silicon single crystal

Method for manufacturing silicon single crystal, and silicon wafer

Apparatus for manufacturing semiconductor single crystal

Method for growing silicon single crystal and silicon wafer

Silicon wafer, method for manufacturing the same and method for gro...

Process for growing silicon single crystal and process for producin...

Apparatus for manufacturing semiconductor single crystal

Manufacturing method of hydrogen-doped silicon single crystal

Patents Applicationslast 30 patents

PRODUCTION METHOD FOR SILICON MONOCRYSTAL AND PRODUCTION METHOD FOR...

HEATING PART OF SILICON SINGLE CRYSTAL MANUFACTURING DEVICE, CONVEC...

METHOD FOR CONTROLLING CONVECTION PATTERN OF SILICON MELT AND METHO...

SILICON MONOCRYSTAL MANUFACTURING METHOD AND SILICON MONOCRYSTAL PU...

METHOD OF CONTROLLING CONVECTION PATTERNS OF SILICON MELT AND METHO...

METHOD FOR CONTROLLING CONVECTION PATTERN OF SILICON MELT, METHOD F...

METHOD OF ESTIMATING CONVECTION PATTERN OF SILICON MELT, METHOD OF...

METHOD AND APPARATUS FOR MANUFACTURING SILICON SINGLE CRYSTAL

METHOD OF PRODUCING SILICON SINGLE CRYSTAL INGOT AND SILICON SINGLE...

METHOD OF PRODUCING SILICON SINGLE CRYSTAL INGOT AND SILICON SINGLE...

APPARATUS FOR MANUFACTURING SILICON SINGLE CRYSTAL AND MELT INLET P...

METHOD OF PRODUCING EPITAXIAL WAFER AS WELL AS EPITAXIAL WAFER

SILICON SINGLE CRYSTAL WAFER FOR IGBT AND METHOD FOR MANUFACTURING...

SILICON WAFER AND METHOD FOR MANUFACTURING THE SAME

SILICON SINGLE CRYSTAL AND METHOD FOR GROWING THEREOF, AND SILICON...

Method for growing silicon single crystal, and silicon wafer

Method for growing silicon single crystal, and silicon wafer

Method for Manufacturing Silicon Wafer and Silicon Wafer Manufactur...

Silicon single crystal wafer for IGBT and method for manufacturing...

Silicon wafer, method for manufacturing the same and method for gro...

Silicon wafer and method for producing same

Method for growing silicon single crystal and silicon wafer

Manufacturing method of hydrogen-doped silicon single crystal

Process for producing silicon single crystal

Process for growing silicon single crystal and process for producin...

Apparatus for manufacturing semiconductor single crystal

Apparatus for manufacturing semiconductor single crystal

Silicon wafer, method for producing silicon wafer and method for gr...

Method for supplying hydrogen gas in silicon single-crystal growth,...

Method for growing silicon single crystal, and silicon wafer