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Wataru YAMANE
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Charged particle beam device
Patent number
11,152,186
Issue date
Oct 19, 2021
HITACHI HIGH-TECH CORPORATION
Wataru Yamane
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Charged Particle Beam Device
Publication number
20190311875
Publication date
Oct 10, 2019
Hitachi High-Technologies Corporation
Wataru YAMANE
H01 - BASIC ELECTRIC ELEMENTS