Wataru YANO

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning brush and substrate cleaning apparatus
- Patent number 10,892,174
- Issue date Jan 12, 2021
- SCREEN Holdings Co., Ltd.
- Nobuyasu Hiraoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus
- Patent number 10,821,483
- Issue date Nov 3, 2020
- SCREEN Holdings Co., Ltd.
- Wataru Yano
- A46 - BRUSHWARE

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HOLDING DEVICE AND SUBSTRATE TREATING APPARATUS PROVIDED...
- Publication number 20240253180
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Wataru YANO
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
- Publication number 20240258098
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Wataru YANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONDITIONING POLISHING TOOL, SUBSTRATE PROCESSING METHOD...
- Publication number 20240253182
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Ryohei HOKAKU
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING BRUSH AND SUBSTRATE CLEANING APPARATUS
- Publication number 20190228991
- Publication date Jul 25, 2019
- SCREEN Holdings Co., Ltd.
- Nobuyasu HIRAOKA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20180078973
- Publication date Mar 22, 2018
- SCREEN Holdings Co., Ltd.
- Wataru YANO
- A46 - BRUSHWARE