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Wayne Arseneault
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Lynnfield, MA, US
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last 30 patents
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Patent Grant
Workpiece handling scan arm for ion implantation system
Patent number
7,560,705
Issue date
Jul 14, 2009
Axcelis Technologies, Inc.
Ari Eiriksson
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM
Publication number
20080105836
Publication date
May 8, 2008
Ari Eiriksson
H01 - BASIC ELECTRIC ELEMENTS