Wayne Babie

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Pougkeepsie, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Unique process chemistry for etching organic low-k materials
- Patent number 6,841,483
- Issue date Jan 11, 2005
- Lam Research Corporation
- Helen H. Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective silicon nitride plasma etching process
- Patent number 5,431,772
- Issue date Jul 11, 1995
- International Business Machines Corporation
- Wayne T. Babie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective silicon nitride plasma etching
- Patent number 5,188,704
- Issue date Feb 23, 1993
- International Business Machines Corporation
- Wayne T. Babie
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Unique process chemistry for etching organic low-k materials
- Publication number 20020111036
- Publication date Aug 15, 2002
- Lam Research Corporation
- Helen H. Zhu
- H01 - BASIC ELECTRIC ELEMENTS