Wayne Chen

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Automatic inspection system for flat panel substrate
- Patent number 7,714,996
- Issue date May 11, 2010
- 3i Systems Corporation
- Zheng Yan
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for inspecting surfaces with improved light effic...
- Patent number 7,564,544
- Issue date Jul 21, 2009
- 3i Systems Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
System and methods for classifying anomalies of sample surfaces
- Patent number 7,315,365
- Issue date Jan 1, 2008
- KLA-Tencor Corporation
- Wayne Chen
- G01 - MEASURING TESTING
Information Patent Grant
System and methods for classifying anomalies of sample surfaces
- Patent number 7,038,772
- Issue date May 2, 2006
- KLA-Tencor Corporation
- Wayne Chen
- G01 - MEASURING TESTING
Information Patent Grant
System and methods for classifying anomalies of sample surfaces
- Patent number 7,016,031
- Issue date Mar 21, 2006
- KLA-Tencor Corporation
- Wayne Chen
- G01 - MEASURING TESTING
Information Patent Grant
System and methods for classifying anomalies of sample surfaces
- Patent number 6,590,645
- Issue date Jul 8, 2003
- KLA-Tencor Corporation
- Wayne Chen
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Automatic inspection system for flat panel substrate
- Publication number 20080174771
- Publication date Jul 24, 2008
- Zheng Yan
- G01 - MEASURING TESTING
Information Patent Application
Method and system for inspecting surfaces with improved light effic...
- Publication number 20070222974
- Publication date Sep 27, 2007
- 3i Systems, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
System and methods for classifying anomalies of sample surfaces
- Publication number 20060192951
- Publication date Aug 31, 2006
- Wayne Chen
- G01 - MEASURING TESTING
Information Patent Application
System and methods for classifying anomalies of sample surfaces
- Publication number 20040169852
- Publication date Sep 2, 2004
- Wayne Chen
- G01 - MEASURING TESTING
Information Patent Application
System and methods for classifying anomalies of sample surfaces
- Publication number 20040085532
- Publication date May 6, 2004
- Wayne Chen
- G01 - MEASURING TESTING