Wayne Chen

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Brookline, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Model-based controlled load lock pumping scheme
- Patent number 12,278,124
- Issue date Apr 15, 2025
- Applied Materials, Inc.
- D. Jeffrey Lischer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INCREASED ETCH RESISTANCE OF NITRIDE LAYERS USING CHEMICAL VAPOR DE...
- Publication number 20250226211
- Publication date Jul 10, 2025
- Applied Materials, Inc.
- Rajesh PRASAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRESS MODULATION OF NITRIDE LAYERS USING CHEMICAL VAPOR DEPOSITION...
- Publication number 20250226226
- Publication date Jul 10, 2025
- Applied Materials, Inc.
- Rajesh PRASAD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Model-Based Controlled Load Lock Pumping Scheme
- Publication number 20230138326
- Publication date May 4, 2023
- Applied Materials, Inc.
- D. Jeffrey Lischer
- H01 - BASIC ELECTRIC ELEMENTS