Wayne Fitzgerald

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Andover, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Wafer singulation process control
- Patent number 11,315,832
- Issue date Apr 26, 2022
- Onto Innovation Inc.
- Wayne Fitzgerald
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection of substrates
- Patent number 10,553,504
- Issue date Feb 4, 2020
- Rudolph Technologies, Inc.
- Gurvinder Singh
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device inspection of metallic discontinuities
- Patent number 10,466,179
- Issue date Nov 5, 2019
- Rudoplh Technologies, Inc.
- Gurvinder Singh
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
WAFER SINGULATION PROCESS CONTROL
- Publication number 20190019728
- Publication date Jan 17, 2019
- Rudolph Technologies, Inc.
- Wayne Fitzgerald
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION OF SUBSTRATES
- Publication number 20180277452
- Publication date Sep 27, 2018
- Rudolph Technologies, Inc.
- Gurvinder Singh
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE INSPECTION OF METALLIC DISCONTINUITIES
- Publication number 20180275063
- Publication date Sep 27, 2018
- Rudolph Technologies, Inc.
- Gurvinder Singh
- G01 - MEASURING TESTING