Wayne J. Dunstan

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
EUV LPP source with improved dose control by combining pulse modula...
- Patent number 9,755,396
- Issue date Sep 5, 2017
- ASML Netherlands B.V.
- Paul Frihauf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method to adaptively pre-compensate for target material...
- Patent number 9,588,430
- Issue date Mar 7, 2017
- ASML Netherlands B.V.
- Jeroen van der Burgt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method to adaptively pre-compensate for target material...
- Patent number 9,238,243
- Issue date Jan 19, 2016
- ASML Netherlands B.V.
- Jeroen van der Burgt
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of timing laser beam pulses to regulate extreme ultraviolet...
- Patent number 8,872,122
- Issue date Oct 28, 2014
- ASML Netherlands B.V.
- Alexander Schafgans
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
System and method to optimize extreme ultraviolet light generation
- Patent number 8,598,552
- Issue date Dec 3, 2013
- Cymer, Inc.
- Paul Frihauf
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Active spectral control of DUV laser light source
- Patent number 8,098,698
- Issue date Jan 17, 2012
- Cymer, Inc.
- Wayne J. Dunstan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Active spectral control of DUV light source
- Patent number 7,852,889
- Issue date Dec 14, 2010
- Cymer, Inc.
- Wayne J. Dunstan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser gas injection system
- Patent number 7,835,414
- Issue date Nov 16, 2010
- Cymer, Inc.
- Wayne J. Dunstan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ultraviolet laser light source pulse energy control system
- Patent number 7,830,942
- Issue date Nov 9, 2010
- Cymer, Inc.
- Wayne J. Dunstan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-chambered excimer or molecular fluorine gas discharge laser f...
- Patent number 7,741,639
- Issue date Jun 22, 2010
- Cymer, Inc.
- Herve A. Besaucele
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
System and Method to Adaptively Pre-Compensate for Target Material...
- Publication number 20160202614
- Publication date Jul 14, 2016
- ASML NETHERLANDS B.V.
- Jeroen van der Burgt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method of Timing Laser Beam Pulses to Regulate Extreme Ultraviolet...
- Publication number 20140191132
- Publication date Jul 10, 2014
- Cymer, Inc.
- Alexander Schafgans
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
System and Method to Adaptively Pre-Compensate for Target Material...
- Publication number 20140091239
- Publication date Apr 3, 2014
- Jeroen van der Burgt
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
System and Method To Optimize Extreme Ultraviolet Light Generation
- Publication number 20130320244
- Publication date Dec 5, 2013
- Cymer, Inc.
- Paul Frihauf
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Active spectral control of DUV laser light source
- Publication number 20110051760
- Publication date Mar 3, 2011
- Cymer, Inc.
- Wayne J. Dunstan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Ultraviolet laser light source pulse energy control system
- Publication number 20090067457
- Publication date Mar 12, 2009
- Cymer, Inc.
- Wayne J. Dunstan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser gas injection system
- Publication number 20080205472
- Publication date Aug 28, 2008
- Cymer, Inc.
- Wayne J. Dunstan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Active spectral control of DUV light source
- Publication number 20070195836
- Publication date Aug 23, 2007
- Cymer, Inc.
- Wayne J. Dunstan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Multi-chambered excimer or molecular fluorine gas discharge laser f...
- Publication number 20050094698
- Publication date May 5, 2005
- Herve A. Besaucele
- H01 - BASIC ELECTRIC ELEMENTS

Wayne J. Dunstan

Person

Patents Grantslast 30 patents

EUV LPP source with improved dose control by combining pulse modula...

System and method to adaptively pre-compensate for target material...

System and method to adaptively pre-compensate for target material...

Method of timing laser beam pulses to regulate extreme ultraviolet...

System and method to optimize extreme ultraviolet light generation

Active spectral control of DUV laser light source

Active spectral control of DUV light source

Laser gas injection system

Ultraviolet laser light source pulse energy control system

Multi-chambered excimer or molecular fluorine gas discharge laser f...

Patents Applicationslast 30 patents

System and Method to Adaptively Pre-Compensate for Target Material...

Method of Timing Laser Beam Pulses to Regulate Extreme Ultraviolet...

System and Method to Adaptively Pre-Compensate for Target Material...

System and Method To Optimize Extreme Ultraviolet Light Generation

Active spectral control of DUV laser light source

Ultraviolet laser light source pulse energy control system

Laser gas injection system

Active spectral control of DUV light source

Multi-chambered excimer or molecular fluorine gas discharge laser f...