Wayne Lougher

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Phoenix, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Laminated wear ring
- Patent number 6,758,939
- Issue date Jul 6, 2004
- SpeedFam-IPEC Corporation
- David Marquardt
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece carrier retaining element
- Patent number 6,736,713
- Issue date May 18, 2004
- SpeedFam-IPEC Corporation
- Wayne F. Lougher
- B24 - GRINDING POLISHING
Information Patent Grant
Rigid polishing pad conditioner for chemical mechanical polishing tool
- Patent number 6,409,580
- Issue date Jun 25, 2002
- SpeedFam-IPEC Corporation
- Wayne Lougher
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Laminated wear ring
- Publication number 20030041967
- Publication date Mar 6, 2003
- SpeedFam-IPEC Corporation
- David Marquardt
- B24 - GRINDING POLISHING
Information Patent Application
Reinforced CMP carrier bladders
- Publication number 20020077049
- Publication date Jun 20, 2002
- SpeedFam-IPEC Corporation
- Clinton O. Fruitman
- B24 - GRINDING POLISHING
Information Patent Application
Workpiece carrier retaining element
- Publication number 20020037693
- Publication date Mar 28, 2002
- Wayne F. Lougher
- B24 - GRINDING POLISHING