Wayne Tang

Follow

Person

Union City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Integrated wafer bow measurements
- Patent number 11,885,750
- Issue date Jan 30, 2024
- Lam Research Corporation
- Rajan Arora
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic rotational hardstop for robot
- Patent number 8,757,345
- Issue date Jun 24, 2014
- Novellus Systems, Inc.
- Rich Blank
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
High throughput servo load cup with integrated wet chemistry delivery
- Patent number 7,811,153
- Issue date Oct 12, 2010
- Novellus Systems, Inc.
- Rich Blank
- B24 - GRINDING POLISHING
Information Patent Grant
Automatic calibration of a wafer-handling robot
- Patent number 6,934,606
- Issue date Aug 23, 2005
- Novellus Systems, Inc.
- Damon Genetti
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED WAFER BOW MEASUREMENTS
- Publication number 20240094144
- Publication date Mar 21, 2024
- LAM RESEARCH CORPORATION
- Rajan Arora
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED WAFER BOW MEASUREMENTS
- Publication number 20220074869
- Publication date Mar 10, 2022
- LAM RESEARCH CORPORATION
- Rajan Arora
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC ROTATIONAL HARDSTOP FOR ROBOT
- Publication number 20100278623
- Publication date Nov 4, 2010
- Novellus Systems, Inc.
- Rich Blank
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS