Wayne Tu

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for nitride spacer etch process implementing i...
- Patent number 6,977,184
- Issue date Dec 20, 2005
- Lam Research Corporation
- Wen-Ben Chou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for nitride spacer etch process implementing i...
- Publication number 20060040415
- Publication date Feb 23, 2006
- Lam Research Corp.
- Wen-Ben Chou
- H01 - BASIC ELECTRIC ELEMENTS