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Hsin-Chu City, TW
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last 30 patents
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Patent Grant
High density plasma chemical vapor deposition process
Patent number
7,514,014
Issue date
Apr 7, 2009
United Microelectronics Corporation
Chih-Chien Liu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
High density plasma chemical vapor deposition process
Publication number
20060099824
Publication date
May 11, 2006
Chih-Chien Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High density plasma chemical vapor deposition process
Publication number
20050003671
Publication date
Jan 6, 2005
United Microelectronics Corporation
Chih-Chien Liu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
High density plasma chemical vapor deposition process
Publication number
20020030033
Publication date
Mar 14, 2002
Chih-Chien Liu
H01 - BASIC ELECTRIC ELEMENTS