Wee-Teck Chia

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for detecting defects on a reticle
- Patent number 8,041,106
- Issue date Oct 18, 2011
- KLA-Tencor Corp.
- Patrick Tung-Sing Pak
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND SYSTEMS FOR DETECTING DEFECTS ON A RETICLE
- Publication number 20100142800
- Publication date Jun 10, 2010
- KLA-Tencor Corporation
- Patrick Tung-Sing Pak
- G06 - COMPUTING CALCULATING COUNTING