Wei Chang

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Los Altos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Susceptor shaft vacuum pumping
- Patent number 6,896,929
- Issue date May 24, 2005
- Applied Materials, Inc.
- Sanjay Yadav
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method of shaping profiles of large-area PECVD electr...
- Publication number 20060005771
- Publication date Jan 12, 2006
- APPLIED MATERIALS, INC.
- John M. White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Susceptor shaft vacuum pumping
- Publication number 20030026904
- Publication date Feb 6, 2003
- APPLIED MATERIALS, INC.
- Sanjay Yadav
- H01 - BASIC ELECTRIC ELEMENTS