Wei Chang

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Foster City, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Determining critical parameters using a high-dimensional variable s...
- Patent number 11,456,194
- Issue date Sep 27, 2022
- KLA-Tencor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automatic defect classification without sampling and feature selection
- Patent number 10,650,508
- Issue date May 12, 2020
- KLA-Tencor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Statistical overlay error prediction for feed forward and feedback...
- Patent number 10,545,412
- Issue date Jan 28, 2020
- KLA-Tencor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Determining critical parameters using a high-dimensional variable s...
- Patent number 10,361,105
- Issue date Jul 23, 2019
- KLA-Tencor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Predictive wafer modeling based focus error prediction using correl...
- Patent number 9,707,660
- Issue date Jul 18, 2017
- KLA-Tencor Corporation
- Pradeep Vukkadala
- B24 - GRINDING POLISHING
Information Patent Grant
Statistical overlay error prediction for feed forward and feedback...
- Patent number 9,087,176
- Issue date Jul 21, 2015
- KLA-Tencor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
DETERMINING CRITICAL PARAMETERS USING A HIGH-DIMENSIONAL VARIABLE S...
- Publication number 20190311928
- Publication date Oct 10, 2019
- KLA-Tencor Corporation
- Wei CHANG
- G05 - CONTROLLING REGULATING
Information Patent Application
Statistical Overlay Error Prediction for Feed Forward and Feedback...
- Publication number 20170017162
- Publication date Jan 19, 2017
- KLA-Tenor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Automatic Defect Classification Without Sampling and Feature Selection
- Publication number 20160163035
- Publication date Jun 9, 2016
- KLA-Tencor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETERMINING CRITICAL PARAMETERS USING A HIGH-DIMENSIONAL VARIABLE S...
- Publication number 20160163574
- Publication date Jun 9, 2016
- KLA-Tencor Corporation
- Wei CHANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Predictive Modeling Based Focus Error Prediction
- Publication number 20150302312
- Publication date Oct 22, 2015
- KLA-Tencor Corporation
- Pradeep Vukkadala
- G01 - MEASURING TESTING