TREA

Wei Chen

Follow

Person

  • Andover, MA, US
People

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20090294063
    • Publication date Dec 3, 2009
    • ULVAC INC.
    • Toshio HAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20020170678
    • Publication date Nov 21, 2002
    • Toshio Hayashi
    • H01 - BASIC ELECTRIC ELEMENTS