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Wei-Cheng LI
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Keelung City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Slurry feed system and method of providing slurry to chemical mecha...
Patent number
10,814,455
Issue date
Oct 27, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Tsung-Huang Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Slurry feed system and method of providing slurry to chemical mecha...
Patent number
9,744,642
Issue date
Aug 29, 2017
Taiwan Semiconductor Manufacturing Co., Ltd
Tsung-Huang Chen
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
SLURRY FEED SYSTEM AND METHOD OF PROVIDING SLURRY TO CHEMICAL MECHA...
Publication number
20170320193
Publication date
Nov 9, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsung-Huang CHEN
B24 - GRINDING POLISHING
Information
Patent Application
SLURRY FEED SYSTEM AND METHOD OF PROVIDING SLURRY TO CHEMICAL MECHA...
Publication number
20150117135
Publication date
Apr 30, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsung-Huang CHEN
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL