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WEI-DA KANG
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HSINCHU, TW
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for real-time tool defect detection
Patent number
12,066,371
Issue date
Aug 20, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Wei-Da Kang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
Publication number
20230307457
Publication date
Sep 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Cheng KANG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD AND APPARATUS FOR REAL-TIME TOOL DEFECT DETECTION
Publication number
20230065080
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing company Ltd.
WEI-DA KANG
H01 - BASIC ELECTRIC ELEMENTS