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Wei-Hsu Wang
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Lin-Yuan, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Method of cleaning a chamber of a CVD machine and elements within
Patent number
6,569,253
Issue date
May 27, 2003
United Microelectronics Corp.
Wei-Hsu Wang
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
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Patent Application
Method of cleaning a chamber of a CVD machine and elements within
Publication number
20020157687
Publication date
Oct 31, 2002
Wei-Hsu Wang
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
System and method for status settings of semiconductor equipment wi...
Publication number
20020098600
Publication date
Jul 25, 2002
United Microelectronics Corp.
Jack Yao
H01 - BASIC ELECTRIC ELEMENTS