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Wei-Hua HOUNG
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Hsinchu City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Robot arm device and method for transferring wafer
Patent number
11,837,484
Issue date
Dec 5, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wei-Hua Houng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Orientation chamber of substrate processing system with purging fun...
Patent number
11,581,181
Issue date
Feb 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-Hua Houng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cluster tool and method using the same
Patent number
11,177,150
Issue date
Nov 16, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Wei-Hua Houng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Robot arm device and method for transferring wafer
Patent number
11,004,713
Issue date
May 11, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Wei-Hua Houng
G01 - MEASURING TESTING
Information
Patent Grant
Orientation chamber of substrate processing system with purging fun...
Patent number
10,854,442
Issue date
Dec 1, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Wei-Hua Houng
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
ROBOT ARM DEVICE AND METHOD FOR TRANSFERRING WAFER
Publication number
20210233788
Publication date
Jul 29, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Hua HOUNG
G01 - MEASURING TESTING
Information
Patent Application
ORIENTATION CHAMBER OF SUBSTRATE PROCESSING SYSTEM WITH PURGING FUN...
Publication number
20210111016
Publication date
Apr 15, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Hua HOUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ROBOT ARM DEVICE AND METHOD FOR TRANSFERRING WAFER
Publication number
20200365436
Publication date
Nov 19, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Hua HOUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLUSTER TOOL AND METHOD USING THE SAME
Publication number
20200294834
Publication date
Sep 17, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Hua HOUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ORIENTATION CHAMBER OF SUBSTRATE PROCESSING SYSTEM WITH PURGING FUN...
Publication number
20200006050
Publication date
Jan 2, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Hua HOUNG
H01 - BASIC ELECTRIC ELEMENTS