Wei-Kang Tu

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Hsinchu, TW

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Patents Grantslast 30 patents

Information Patent Grant
System and method for chemical mechanical polishing pad replacement
- Patent number 12,202,094
- Issue date Jan 21, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Chung Chen
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR CHEMICAL MECHANICAL POLISHING PAD REPLACEMENT
- Publication number 20230009839
- Publication date Jan 12, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Shih-Chung Chen
- B24 - GRINDING POLISHING