Wei Liu

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Chandler, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of making a micro-electro-mechanical-systems (MEMS) device
- Patent number 8,455,286
- Issue date Jun 4, 2013
- FREESCALE SEMICONDUCTOR, INC.
- Lisa H. Karlin
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MAKING A MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) DEVICE
- Publication number 20120107993
- Publication date May 3, 2012
- Lisa H. Karlin
- B81 - MICRO-STRUCTURAL TECHNOLOGY