Wei Lu

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Nedlands, AU

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Patents Grantslast 30 patents

Information Patent Grant
Substrate features for inductive monitoring of conductive trench depth
- Patent number 10,199,281
- Issue date Feb 5, 2019
- Applied Materials, Inc.
- Wei Lu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COMPENSATION FOR SUBSTRATE DOPING FOR IN-SITU ELECTROMAGNETIC INDUC...
- Publication number 20190389028
- Publication date Dec 26, 2019
- Wei Lu
- B24 - GRINDING POLISHING
Information Patent Application
INDUCTIVE MONITORING OF CONDUCTIVE LOOPS
- Publication number 20190035699
- Publication date Jan 31, 2019
- Applied Materials, Inc.
- Wei Lu
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE FEATURES FOR INDUCTIVE MONITORING OF CONDUCTIVE TRENCH DEPTH
- Publication number 20180166347
- Publication date Jun 14, 2018
- Applied Materials, Inc.
- Wei Lu
- H01 - BASIC ELECTRIC ELEMENTS