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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
RF power compensation to reduce deposition or etch rate changes in...
Patent number
12,057,295
Issue date
Aug 6, 2024
Lam Research Corporation
Wei Yi Luo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
Publication number
20240258129
Publication date
Aug 1, 2024
Lam Reseach Corporation
Dengliang YANG
B08 - CLEANING
Information
Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
Publication number
20240258130
Publication date
Aug 1, 2024
LAM RESEARCH CORPORATION
Dengliang YANG
B08 - CLEANING
Information
Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
Publication number
20240258131
Publication date
Aug 1, 2024
LAM RESEARCH CORPORATION
Dengliang YANG
B08 - CLEANING
Information
Patent Application
PULSING REMOTE PLASMA FOR ION DAMAGE REDUCTION AND ETCH UNIFORMITY...
Publication number
20230223237
Publication date
Jul 13, 2023
LAM RESEARCH CORPORATION
Wei Yi LUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Arcing Reduction in Wafer Bevel Edge Plasma Processing
Publication number
20230215692
Publication date
Jul 6, 2023
LAM RESEARCH CORPORATION
Xuefeng Hua
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF POWER COMPENSATION TO REDUCE DEPOSITION OR ETCH RATE CHANGES IN...
Publication number
20210313152
Publication date
Oct 7, 2021
LAM RESEARCH CORPORATION
Wei Yi LUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and Method for Interconnecting a Portable Electronic Devi...
Publication number
20130290569
Publication date
Oct 31, 2013
O2Micro, Inc.
Wei LUO
H04 - ELECTRIC COMMUNICATION TECHNIQUE