Wei-Min Wang

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Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for polishing and planarization
- Patent number 6,878,040
- Issue date Apr 12, 2005
- Wei-Min Wang
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for polishing and planarization
- Publication number 20040043706
- Publication date Mar 4, 2004
- Wei-Min Wang
- B24 - GRINDING POLISHING