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DEPOSITION WINDOW ENLARGEMENT
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Publication number 20240387180
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Publication date Nov 21, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Meng-Han Chou
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H01 - BASIC ELECTRIC ELEMENTS
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SELECTIVE DUAL SILICIDE FORMATION
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Publication number 20240387288
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Publication date Nov 21, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Wei-Yip LOH
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H01 - BASIC ELECTRIC ELEMENTS
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SEMICONDUCTOR DEVICE PRE-CLEANING
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Publication number 20240136226
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Publication date Apr 25, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Li-Wei CHU
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H01 - BASIC ELECTRIC ELEMENTS
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DEPOSITION WINDOW ENLARGEMENT
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Publication number 20230369055
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Publication date Nov 16, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Meng-Han Chou
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H01 - BASIC ELECTRIC ELEMENTS
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SELECTIVE DUAL SILICIDE FORMATION
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Publication number 20230260847
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Publication date Aug 17, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Wei-Yip LOH
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H01 - BASIC ELECTRIC ELEMENTS
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Treatment for Adhesion Improvement
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Publication number 20230187201
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Publication date Jun 15, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Ching-Yi Chen
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H01 - BASIC ELECTRIC ELEMENTS
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SELECTIVE DUAL SILICIDE FORMATION
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Publication number 20230054633
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Publication date Feb 23, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Wei-Yip LOH
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H01 - BASIC ELECTRIC ELEMENTS
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Contact with a Silicide Region
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Publication number 20220367667
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Publication date Nov 17, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Yu-Wen Cheng
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H01 - BASIC ELECTRIC ELEMENTS
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SEMICONDUCTOR DEVICE PRE-CLEANING
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Publication number 20220328350
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Publication date Oct 13, 2022
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Li-Wei CHU
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H01 - BASIC ELECTRIC ELEMENTS
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AMMONIUM FLUORIDE PRE-CLEAN PROTECTION
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Publication number 20220149519
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Publication date May 12, 2022
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Taiwan Semiconductor Manufacturing Company Limited
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Li-Wei CHU
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H01 - BASIC ELECTRIC ELEMENTS
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Deposition Window Enlargement
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Publication number 20210407808
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Publication date Dec 30, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Meng-Han Chou
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H01 - BASIC ELECTRIC ELEMENTS
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