Wei ZHANG

Person

Chupei City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for preventing backside peeling defects on semiconductor...
- Patent number 12,080,587
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Yu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and system for preventing backside peeling defects on sem...
- Patent number 10,748,806
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Yu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and system for preventing backside peeling defects on sem...
- Patent number 10,163,676
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Yu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for controlling semiconductor deposition operation
- Patent number 10,113,228
- Issue date Oct 30, 2018
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chung-Liang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit of physical vapor deposition chamber and fabricating me...
- Patent number 9,803,274
- Issue date Oct 31, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Wei Bih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device with tunable work function
- Patent number 9,685,441
- Issue date Jun 20, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Liang Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid precursor delivery system
- Patent number 9,611,546
- Issue date Apr 4, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Liang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanisms for monitoring impurity in high-K dielectric film
- Patent number 9,553,160
- Issue date Jan 24, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Jen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with tunable work function
- Patent number 9,548,372
- Issue date Jan 17, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Liang Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planarization method, method for polishing wafer, and CMP system
- Patent number 9,425,109
- Issue date Aug 23, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Liang Cheng
- B24 - GRINDING POLISHING
Information Patent Grant
Method for tuning threshold voltage of semiconductor device with me...
- Patent number 9,362,385
- Issue date Jun 7, 2016
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chung-Liang Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating semiconductor structure, and solid precursor...
- Patent number 9,343,315
- Issue date May 17, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Liang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for chemical mechanical polishing
- Patent number 9,227,294
- Issue date Jan 5, 2016
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chung-Liang Cheng
- B24 - GRINDING POLISHING
Information Patent Grant
Composition and method for chemical mechanical polishing
- Patent number 9,228,114
- Issue date Jan 5, 2016
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chung-Liang Cheng
- B24 - GRINDING POLISHING
Information Patent Grant
Plasma treatment at film layer to reduce sheet resistance and to im...
- Patent number 7,358,612
- Issue date Apr 15, 2008
- Taiwan Semiconductor Manufacturing Company
- Jian-Shin Tsai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR PREVENTING BACKSIDE PEELING DEFECTS ON SEMICONDUCTOR...
- Publication number 20200381287
- Publication date Dec 3, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Yu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEM FOR PREVENTING BACKSIDE PEELING DEFECTS ON SEM...
- Publication number 20190139810
- Publication date May 9, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Yu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH TUNABLE WORK FUNCTION
- Publication number 20170092644
- Publication date Mar 30, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Liang CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISPENSER AND DEPOSITION APPARATUS USING THE SAME
- Publication number 20160362782
- Publication date Dec 15, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Liang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL-MECHANICAL PLANARIZATION SYSTEM
- Publication number 20160332277
- Publication date Nov 17, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Liang CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLID PRECURSOR DELIVERY SYSTEM
- Publication number 20160230275
- Publication date Aug 11, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Liang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE WITH TUNABLE WORK FUNCTION
- Publication number 20160225871
- Publication date Aug 4, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Liang CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROPLATING APPARATUS AND METHOD
- Publication number 20160222537
- Publication date Aug 4, 2016
- Taiwan Semiconductor Manufacturing company Ltd.
- YUNG DI SHEN
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD FOR CONTROLLING SEMICONDUCTOR DEPOSITION OPERATION
- Publication number 20150371847
- Publication date Dec 24, 2015
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUNG-LIANG CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANARIZATION METHOD, METHOD FOR POLISHING WAFER, AND CMP SYSTEM
- Publication number 20150348856
- Publication date Dec 3, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Liang CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20150183080
- Publication date Jul 2, 2015
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUNG-LIANG CHENG
- B24 - GRINDING POLISHING
Information Patent Application
COMPOSITION AND METHOD FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20150166837
- Publication date Jun 18, 2015
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUNG-LIANG CHENG
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH METAL GATE AND MANUFACURING METHOD THE...
- Publication number 20150171177
- Publication date Jun 18, 2015
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUNG-LIANG CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR STRUCTURE, AND SOLID PRECURSOR...
- Publication number 20150147892
- Publication date May 28, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Liang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KIT OF PHYSICAL VAPOR DEPOSITION CHAMBER AND FABRICATING ME...
- Publication number 20150129414
- Publication date May 14, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Wei BIH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND PRE-CLEAN SYSTEM
- Publication number 20150129131
- Publication date May 14, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Ching LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MECHANISMS FOR MONITORING IMPURITY IN HIGH-K DIELECTRIC FILM
- Publication number 20150099315
- Publication date Apr 9, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Wei-Jen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and System for Preventing Backside Peeling Defects on Sem...
- Publication number 20150000599
- Publication date Jan 1, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Yu Chen
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Apparatus for preventing backside peeling defects on semiconductor...

Apparatus and system for preventing backside peeling defects on sem...

Apparatus and system for preventing backside peeling defects on sem...

Method for controlling semiconductor deposition operation

Process kit of physical vapor deposition chamber and fabricating me...

Semiconductor device with tunable work function

Solid precursor delivery system

Mechanisms for monitoring impurity in high-K dielectric film

Semiconductor device with tunable work function

Planarization method, method for polishing wafer, and CMP system

Method for tuning threshold voltage of semiconductor device with me...

Method for fabricating semiconductor structure, and solid precursor...

Apparatus and method for chemical mechanical polishing

Composition and method for chemical mechanical polishing

Plasma treatment at film layer to reduce sheet resistance and to im...

Patents Applicationslast 30 patents

APPARATUS FOR PREVENTING BACKSIDE PEELING DEFECTS ON SEMICONDUCTOR...

APPARATUS AND SYSTEM FOR PREVENTING BACKSIDE PEELING DEFECTS ON SEM...

SEMICONDUCTOR DEVICE WITH TUNABLE WORK FUNCTION

GAS DISPENSER AND DEPOSITION APPARATUS USING THE SAME

CHEMICAL-MECHANICAL PLANARIZATION SYSTEM

SOLID PRECURSOR DELIVERY SYSTEM

SEMICONDUCTOR DEVICE WITH TUNABLE WORK FUNCTION

ELECTROPLATING APPARATUS AND METHOD

METHOD FOR CONTROLLING SEMICONDUCTOR DEPOSITION OPERATION

PLANARIZATION METHOD, METHOD FOR POLISHING WAFER, AND CMP SYSTEM

APPARATUS AND METHOD FOR CHEMICAL MECHANICAL POLISHING

COMPOSITION AND METHOD FOR CHEMICAL MECHANICAL POLISHING

SEMICONDUCTOR STRUCTURE WITH METAL GATE AND MANUFACURING METHOD THE...

METHOD FOR FABRICATING SEMICONDUCTOR STRUCTURE, AND SOLID PRECURSOR...

PROCESS KIT OF PHYSICAL VAPOR DEPOSITION CHAMBER AND FABRICATING ME...

SEMICONDUCTOR PROCESSING APPARATUS AND PRE-CLEAN SYSTEM

MECHANISMS FOR MONITORING IMPURITY IN HIGH-K DIELECTRIC FILM

Apparatus and System for Preventing Backside Peeling Defects on Sem...