Wei Zhou

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Enschede, NL

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Patents Grantslast 30 patents

Information Patent Grant
Electromagnetic actuator, stage apparatus and lithographic apparatus
- Patent number 8,687,171
- Issue date Apr 1, 2014
- ASML Netherlands B.V.
- Sven Antoin Johan Hol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ELECTROMAGNETIC ACTUATOR, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS
- Publication number 20120212723
- Publication date Aug 23, 2012
- ASML NETHERLANDS B.V.
- Sven Antoin Johan Hol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY