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Patents Grantslast 30 patents

Information Patent Grant
Silicon nitride etching in a single wafer apparatus
- Patent number 9,355,874
- Issue date May 31, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Weibo Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical dispensing system and method
- Patent number 8,932,962
- Issue date Jan 13, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Weibo Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of semiconductor integrated circuit fabrication
- Patent number 8,735,252
- Issue date May 27, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Weibo Yu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF SEMICONDUCTOR INTEGRATED CIRCUIT FABRICATION
- Publication number 20130330906
- Publication date Dec 12, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Weibo Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL DISPENSING SYSTEM AND METHOD
- Publication number 20130267099
- Publication date Oct 10, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Weibo YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON NITRIDE ETCHING IN A SINGLE WAFER APPARATUS
- Publication number 20130078809
- Publication date Mar 28, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Weibo Yu
- H01 - BASIC ELECTRIC ELEMENTS