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Weichert Heiko
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Utzberg, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Transforming metrology data from a semiconductor treatment system u...
Patent number
8,346,506
Issue date
Jan 1, 2013
Tokyo Electron Limited
Vi Vuong
G01 - MEASURING TESTING
Information
Patent Grant
Transforming metrology data from a semiconductor treatment system u...
Patent number
8,170,833
Issue date
May 1, 2012
Tokyo Electron Limited
Vi Vuong
G01 - MEASURING TESTING
Information
Patent Grant
Substrate processing method, program, computer-readable storage med...
Patent number
7,884,950
Issue date
Feb 8, 2011
Tokyo Electron Limited
Heiko Weichert
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus for deriving an iso-dense bias
Patent number
7,639,370
Issue date
Dec 29, 2009
Tokyo Electron Limited
Joerg Bischoff
G01 - MEASURING TESTING
Information
Patent Grant
Method of controlling a fabrication process using an iso-dense bias
Patent number
7,598,099
Issue date
Oct 6, 2009
Tokyo Electron Limited
Joerg Bischoff
G01 - MEASURING TESTING
Information
Patent Grant
Transforming metrology data from a semiconductor treatment system u...
Patent number
7,467,064
Issue date
Dec 16, 2008
Timbre Technologies, Inc.
Vi Vuong
G01 - MEASURING TESTING
Information
Patent Grant
Method for in-line monitoring and controlling in heat-treating of r...
Patent number
7,445,446
Issue date
Nov 4, 2008
Tokyo Electron Limited
Heiko Weichert
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
TRANSFORMING METROLOGY DATA FROM A SEMICONDUCTOR TREATMENT SYSTEM U...
Publication number
20120199287
Publication date
Aug 9, 2012
TOKYO ELECTRON LIMITED
Vi Vuong
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PROCESSING METHOD, PROGRAM, COMPUTER-READABLE STORAGE MED...
Publication number
20090181316
Publication date
Jul 16, 2009
TOKYO ELECTRON LIMITED
Heiko Weichert
G01 - MEASURING TESTING
Information
Patent Application
Method of Controlling a Fabrication Process Using an Iso-Dense Bias
Publication number
20090118857
Publication date
May 7, 2009
TOKYO ELECTRON LIMITED
Joerg Bischoff
G01 - MEASURING TESTING
Information
Patent Application
Apparatus for Deriving an Iso-Dense Bias
Publication number
20090116010
Publication date
May 7, 2009
TOKYO ELECTRON LIMITED
Joerg Bischoff
G01 - MEASURING TESTING
Information
Patent Application
Method of Deriving an Iso-Dense Bias Using a Hybrid Grating Layer
Publication number
20090116040
Publication date
May 7, 2009
TOKYO ELECTRON LIMITED
Joerg Bischoff
G01 - MEASURING TESTING
Information
Patent Application
TRANSFORMING METROLOGY DATA FROM A SEMICONDUCTOR TREATMENT SYSTEM U...
Publication number
20090094001
Publication date
Apr 9, 2009
Timbre Technologies, Inc.
Vi Vuong
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR IN-LINE MONITORING AND CONTROLLING IN HEAT-TREATING OF R...
Publication number
20080102412
Publication date
May 1, 2008
TOKYO ELECTRON LIMITED
Heiko Weichert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Transforming metrology data from a semiconductor treatment system u...
Publication number
20070185684
Publication date
Aug 9, 2007
Timbre Technologies, Inc.
Vi Vuong
G01 - MEASURING TESTING