Weidong Yang

Person

Milpitas, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Computation efficiency by diffraction order truncation
- Patent number 9,625,937
- Issue date Apr 18, 2017
- KLA-Tencor Corporation
- Joerg Bischoff
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Determining profile parameters of a structure using approximation a...
- Patent number 7,949,490
- Issue date May 24, 2011
- Tokyo Electron Limited
- Wei Liu
- G01 - MEASURING TESTING
Information Patent Grant
Local process variation correction for overlay measurement
- Patent number 7,508,976
- Issue date Mar 24, 2009
- Nanometric Incorporated
- Weidong Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment target to be measured with multiple polarization states
- Patent number 7,236,244
- Issue date Jun 26, 2007
- Nanometrics Incorporated
- Weidong Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment target with designed in offset
- Patent number 7,230,705
- Issue date Jun 12, 2007
- Nanometrics Incorporated
- Weidong Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning two elements using an alignment target with a designed...
- Patent number 7,046,361
- Issue date May 16, 2006
- Nanometrics Incorporated
- Weidong Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring an alignment target with a single polarization state
- Patent number 6,992,764
- Issue date Jan 31, 2006
- Nanometrics Incorporated
- Weidong Yang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for using an alignment target with designed in...
- Patent number 6,982,793
- Issue date Jan 3, 2006
- Nanometrics Incorporated
- Weidong Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Encoder measurement based on layer thickness
- Patent number 6,970,255
- Issue date Nov 29, 2005
- Nanometrics Incorporated
- Blaine R. Spady
- G01 - MEASURING TESTING
Information Patent Grant
Encoder with an alignment target
- Patent number 6,958,819
- Issue date Oct 25, 2005
- Nanometrics Incorporated
- John D. Heaton
- G01 - MEASURING TESTING
Information Patent Grant
Measuring an alignment target with multiple polarization states
- Patent number 6,949,462
- Issue date Sep 27, 2005
- Nanometrics Incorporated
- Weidong Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
COMPUTATION EFFICIENCY BY DIFFRACTION ORDER TRUNCATION
- Publication number 20100042388
- Publication date Feb 18, 2010
- Joerg Bischoff
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETERMINING PROFILE PARAMETERS OF A STRUCTURE USING APPROXIMATION A...
- Publication number 20090063075
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- WEI LIU
- G01 - MEASURING TESTING
Information Patent Application
Determining profile parameters of a structure using approximation a...
- Publication number 20090063076
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- WEI LIU
- G02 - OPTICS

Weidong Yang

Person

Patents Grantslast 30 patents

Computation efficiency by diffraction order truncation

Determining profile parameters of a structure using approximation a...

Local process variation correction for overlay measurement

Alignment target to be measured with multiple polarization states

Alignment target with designed in offset

Positioning two elements using an alignment target with a designed...

Measuring an alignment target with a single polarization state

Method and apparatus for using an alignment target with designed in...

Encoder measurement based on layer thickness

Encoder with an alignment target

Measuring an alignment target with multiple polarization states

Patents Applicationslast 30 patents

COMPUTATION EFFICIENCY BY DIFFRACTION ORDER TRUNCATION

DETERMINING PROFILE PARAMETERS OF A STRUCTURE USING APPROXIMATION A...

Determining profile parameters of a structure using approximation a...