WEIDUNG YANG

Follow

Person

MILPITAS, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Determining profile parameters of a structure using approximation a...
- Patent number 7,729,873
- Issue date Jun 1, 2010
- Tokyo Electron Limited
- Wei Liu
- G01 - MEASURING TESTING
Information Patent Grant
Automated process control using parameters determined with approxim...
- Patent number 7,627,392
- Issue date Dec 1, 2009
- Tokyo Electron Limited
- Wei Liu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
AUTOMATED PROCESS CONTROL USING PARAMETERS DETERMINED WITH APPROXIM...
- Publication number 20090063077
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- WEI LIU
- G05 - CONTROLLING REGULATING