Weihua YIN

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
In-lens wafer pre-charging and inspection with multiple beams
- Patent number 11,152,191
- Issue date Oct 19, 2021
- ASML Netherlands B.V.
- Weihua Yin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...
- Publication number 20230274906
- Publication date Aug 31, 2023
- ASML NETHERLANDS B.V.
- Martinus Gerardus, Maria, Johannes MAASSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-LENS WAFER PE-CHARGING AND INSPECTION WITH MULTIPLE BEAMS
- Publication number 20220102111
- Publication date Mar 31, 2022
- ASML NETHERLANDS B.V.
- Weihua YIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...
- Publication number 20210217582
- Publication date Jul 15, 2021
- ASML NETHERLANDS B.V.
- Martinus Gerardus, Maria, Johannes MAASSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-LENS WAFER PRE-CHARGING AND INSPECTION WITH MULTIPLE BEAMS
- Publication number 20200211818
- Publication date Jul 2, 2020
- ASML NETHERLANDS B.V.
- Weihua YIN
- H01 - BASIC ELECTRIC ELEMENTS