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Weijian Wang
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for determining best focus using dark-field im...
Patent number
7,095,904
Issue date
Aug 22, 2006
Ultratech, Inc.
Weijian Wang
G02 - OPTICS
Information
Patent Grant
Apparatus for and method of reducing or eliminating interference ef...
Patent number
6,554,464
Issue date
Apr 29, 2003
Ultratech Stepper, Inc.
Andrew M. Hawryluk
G02 - OPTICS
Information
Patent Grant
Laser thermal processing apparatus and method
Patent number
6,366,308
Issue date
Apr 2, 2002
Ultratech Stepper, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Method and apparatus for determining best focus using dark-field im...
Publication number
20040145671
Publication date
Jul 29, 2004
ULTRATECH STEPPER, INC.
Weijian Wang
G02 - OPTICS