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Ion implantation apparatus
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Patent number 11,749,501
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Issue date Sep 5, 2023
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NISSIN ION EQUIPMENT CO., LTD.
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Jian Wang
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H01 - BASIC ELECTRIC ELEMENTS
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Ion source
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Patent number 10,600,608
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Issue date Mar 24, 2020
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NISSIN ION EQUIPMENT CO., LTD.
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Masakazu Adachi
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H01 - BASIC ELECTRIC ELEMENTS
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-
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Ion implanter
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Patent number 7,635,850
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Issue date Dec 22, 2009
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Nissin Ion Equipment Co., Ltd.
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Takatoshi Yamashita
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H01 - BASIC ELECTRIC ELEMENTS