Weilun Chao

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El Cerrito, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Etching radical controlled gas chopped deep reactive ion etching
- Patent number 8,546,264
- Issue date Oct 1, 2013
- The Regents of the University of California
- Deirdre Olynick
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING RADICAL CONTROLLED GAS CHOPPED DEEP REACTIVE ION ETCHING
- Publication number 20070015371
- Publication date Jan 18, 2007
- The Regents of the University of California.
- Deirdre L. Olynick
- H01 - BASIC ELECTRIC ELEMENTS