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Weimin Ma
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Reticle defect inspection with systematic defect filter
Patent number
9,224,195
Issue date
Dec 29, 2015
KLA-Tencor Corporation
Bing Li
G01 - MEASURING TESTING
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Patent Grant
Reticle defect inspection with systematic defect filter
Patent number
8,718,353
Issue date
May 6, 2014
KLA-Tencor Corporation
Bing Li
G01 - MEASURING TESTING
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Patent Grant
Defect classification
Patent number
8,165,384
Issue date
Apr 24, 2012
KLA-Tencor Corporation
Weimin Ma
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
RETICLE DEFECT INSPECTION WITH SYSTEMATIC DEFECT FILTER
Publication number
20140205179
Publication date
Jul 24, 2014
KLA-Tencor Corporation
Bing Li
G01 - MEASURING TESTING
Information
Patent Application
RETICLE DEFECT INSPECTION WITH SYSTEMATIC DEFECT FILTER
Publication number
20130236084
Publication date
Sep 12, 2013
KLA-Tencor Corporation
Bing Li
G01 - MEASURING TESTING