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Patents Grants
last 30 patents
Information
Patent Grant
Five-degree-of-freedom heterodyne grating interferometry system
Patent number
11,703,361
Issue date
Jul 18, 2023
BEIJING U-PRECISION TECH CO., LTD.
Ming Zhang
G01 - MEASURING TESTING
Information
Patent Grant
Five-degree-of-freedom heterodyne grating interferometry system
Patent number
11,525,673
Issue date
Dec 13, 2022
Tsinghua University
Yu Zhu
G01 - MEASURING TESTING
Information
Patent Grant
Two-degree-of-freedom heterodyne grating interferometry measurement...
Patent number
11,307,018
Issue date
Apr 19, 2022
Tsinghua University
Yu Zhu
G01 - MEASURING TESTING
Information
Patent Grant
Three-DOF heterodyne grating interferometer displacement measuremen...
Patent number
9,903,704
Issue date
Feb 27, 2018
Tsinghua University
Yu Zhu
G01 - MEASURING TESTING
Information
Patent Grant
Coarse motion and fine motion integrated reticle stage driven by pl...
Patent number
9,904,183
Issue date
Feb 27, 2018
Tsinghua University
Yu Zhu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Magnetically suspended coarse motion and fine motion integrated ret...
Patent number
9,791,789
Issue date
Oct 17, 2017
Tsinghua University
Ming Zhang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
HETERODYNE GRATING INTERFEROMETRY SYSTEM BASED ON SECONDARY DIFFRAC...
Publication number
20230366667
Publication date
Nov 16, 2023
TSINGHUA UNIVERSITY
Yu ZHU
G01 - MEASURING TESTING
Information
Patent Application
Five-degree-of-freedom heterodyne grating interferometry system
Publication number
20220042792
Publication date
Feb 10, 2022
TSINGHUA UNIVERSITY
Yu ZHU
G01 - MEASURING TESTING
Information
Patent Application
FIVE-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY SYSTEM
Publication number
20210262834
Publication date
Aug 26, 2021
TSINGHUA UNIVERSITY
Ming ZHANG
G01 - MEASURING TESTING
Information
Patent Application
TWO-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY MEASUREMENT...
Publication number
20210164772
Publication date
Jun 3, 2021
TSINGHUA UNIVERSITY
Yu ZHU
G01 - MEASURING TESTING
Information
Patent Application
COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PL...
Publication number
20170115580
Publication date
Apr 27, 2017
TSINGHUA UNIVERSITY
Yu ZHU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MAGNETICALLY SUSPENDED COARSE MOTION AND FINE MOTION INTEGRATED RET...
Publication number
20170052461
Publication date
Feb 23, 2017
TSINGHUA UNIVERSITY
Ming ZHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
THREE-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMEN...
Publication number
20160153764
Publication date
Jun 2, 2016
TSINGHUA UNIVERSITY
Yu ZHU
G01 - MEASURING TESTING
Information
Patent Application
TWO-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT...
Publication number
20160138903
Publication date
May 19, 2016
TSINGHUA UNIVERSITY
Ming ZHANG
G01 - MEASURING TESTING