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Newark, DE, US
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last 30 patents
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Patent Grant
Curved grooving of polishing pads
Patent number
7,234,224
Issue date
Jun 26, 2007
Rohm and Haas Electronic Materials CMP Holdings, Inc.
Steven Naugler
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Patents Applications
last 30 patents
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Patent Application
Method of forming grooves in chemical mechanical polishing pad util...
Publication number
20070034614
Publication date
Feb 15, 2007
Harry George McClain
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