WeiWu ZHONG

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
RF power compensation to reduce deposition or etch rate changes in...
- Patent number 12,057,295
- Issue date Aug 6, 2024
- Lam Research Corporation
- Wei Yi Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
RF POWER COMPENSATION TO REDUCE DEPOSITION OR ETCH RATE CHANGES IN...
- Publication number 20240363311
- Publication date Oct 31, 2024
- LAM RESEARCH CORPORATION
- Weiyi LUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF POWER COMPENSATION TO REDUCE DEPOSITION OR ETCH RATE CHANGES IN...
- Publication number 20210313152
- Publication date Oct 7, 2021
- LAM RESEARCH CORPORATION
- Wei Yi LUO
- H01 - BASIC ELECTRIC ELEMENTS