Weiyi Luo

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for metastable activated radical selective stri...
- Patent number 11,694,911
- Issue date Jul 4, 2023
- Lam Research Corporation
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal balanced coil for inductively coupled high density plasma...
- Patent number 7,789,993
- Issue date Sep 7, 2010
- Applied Materials, Inc.
- Robert Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal balanced coil for inductively coupled high density plasma...
- Patent number 7,572,647
- Issue date Aug 11, 2009
- Applied Materials, Inc.
- Robert Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20230369076
- Publication date Nov 16, 2023
- LAM RESEARCH CORPORATION
- Dengliang Yang
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20180174870
- Publication date Jun 21, 2018
- LAM RESEARCH CORPORATION
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERNAL BALANCED COIL FOR INDUCTIVELY COUPLED HIGH DENSITY PLASMA...
- Publication number 20080185284
- Publication date Aug 7, 2008
- Applied Materials, Inc.
- Robert Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERNAL BALANCED COIL FOR INDUCTIVELY COUPLED HIGH DENSITY PLASMA...
- Publication number 20080188090
- Publication date Aug 7, 2008
- Applied Materials, Inc.
- ROBERT CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERNAL BALANCED COIL FOR INDUCTIVELY COUPLED HIGH DENSITY PLASMA...
- Publication number 20080188087
- Publication date Aug 7, 2008
- Applied Materials, Inc.
- ROBERT CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...