Wen-Ben Chou

Follow

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for the optimization of highly selective proc...
- Patent number 7,479,458
- Issue date Jan 20, 2009
- Lam Research Corporation
- Guang-Yaw Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for nitride spacer etch process implementing i...
- Patent number 6,977,184
- Issue date Dec 20, 2005
- Lam Research Corporation
- Wen-Ben Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clean chemistry low-k organic polymer etch
- Patent number 6,337,277
- Issue date Jan 8, 2002
- Lam Research Corporation
- Wen-Ben Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for reducing charging during plasma processing
- Patent number 5,904,571
- Issue date May 18, 1999
- Lam Research Corp.
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for nitride spacer etch process implementing i...
- Publication number 20060040415
- Publication date Feb 23, 2006
- Lam Research Corp.
- Wen-Ben Chou
- H01 - BASIC ELECTRIC ELEMENTS