Wen-Chieh TSOU

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Taichung City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method for cleaning load port of wafer processing apparatus
- Patent number 10,161,033
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsueh-Lei Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CLEANING LOAD PORT OF WAFER PROCESSING APPARATUS
- Publication number 20170049284
- Publication date Feb 23, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Hsueh-Lei WANG
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...