Wen Xiao Chen

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Roseville, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor substrate processing chamber having interchangeable l...
- Patent number 6,500,263
- Issue date Dec 31, 2002
- Applied Materials, Inc,
- Yu Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor substrate processing chamber having interchangeable l...
- Publication number 20020134505
- Publication date Sep 26, 2002
- Yu Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...