Wen-Yao Wei

Follow

Person

Hsinchu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
EUV pellicle and mounting method thereof on photo mask
- Patent number 11,822,230
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wen-Yao Wei
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EUV PELLICLE AND MOUNTING METHOD THEREOF ON PHOTO MASK
- Publication number 20240061325
- Publication date Feb 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Yao WEI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV PELLICLE AND MOUNTING METHOD THEREOF ON PHOTO MASK
- Publication number 20220026796
- Publication date Jan 27, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Yao Wei
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY